Charles W. Bowers
Applicaton Manager at Eco-Snow Systems
SPIE Involvement:
Publications (9)

Proceedings Article | 17 October 2014 Paper
Ralf Taumer, Thorsten Krome, Chuck Bowers, Ivin Varghese, Tyler Hopkins, Roy White, Martin Brunner, Daniel Yi
Proceedings Volume 9235, 923525 (2014)
KEYWORDS: Carbon dioxide, Cryogenics, Diffractive optical elements, Raster graphics, Photomasks, Particles, Scanning electron microscopy, Contamination, SRAF, Mask cleaning

Proceedings Article | 8 November 2012 Paper
Ivin Varghese, Ben Smith, Mehdi Balooch, Chuck Bowers
Proceedings Volume 8522, 852218 (2012)
KEYWORDS: Photomasks, Atmospheric particles, Carbon, Carbon dioxide, Extreme ultraviolet, Contamination, Pellicles, Particles, Silicon, EUV optics

Proceedings Article | 14 October 2011 Paper
Ivin Varghese, Charles Bowers, Mehdi Balooch
Proceedings Volume 8166, 816615 (2011)
KEYWORDS: Carbon dioxide, Photomasks, Extreme ultraviolet, Reflectivity, Aerosols, Pellicles, Ruthenium, EUV optics, Particles, Cryogenics

Proceedings Article | 25 September 2010 Paper
Ivin Varghese, Mehdi Balooch, Charles Bowers
Proceedings Volume 7823, 78232Y (2010)
KEYWORDS: Carbon dioxide, Photomasks, Particles, SRAF, Aerosols, Cryogenics, Atmospheric particles, Mask cleaning, Personal digital assistants, Extreme ultraviolet

Proceedings Article | 30 September 2009 Paper
Charles Bowers, Ivin Varghese, Mehdi Balooch, Jaime Rodriguez
Proceedings Volume 7488, 74881R (2009)
KEYWORDS: Carbon dioxide, Aerosols, SRAF, Cryogenics, Atmospheric particles, Photomasks, Personal digital assistants, Critical dimension metrology, Atomic force microscopy, Contamination

Showing 5 of 9 publications
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