Prof. Charles G. Smith
at Univ of Cambridge
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 12 February 2007
Proc. SPIE. 6464, MEMS/MOEMS Components and Their Applications IV
KEYWORDS: Electrodes, Switching, Resistance, Surface roughness, Metals, Manufacturing, Standards development, Semiconducting wafers, Switches, Logic

Proceedings Article | 23 January 2006
Proc. SPIE. 6112, Microfluidics, BioMEMS, and Medical Microsystems IV
KEYWORDS: Microfluidics, Electrodes, BioMEMS, Microsystems

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