Dr. Charles M. Weber
at Portland State Univ
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | October 20, 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Semiconductors, Statistical analysis, Manufacturing, Reliability, Inspection, Process control, Photomasks, Semiconductor manufacturing, Mask making, Clean room processes

PROCEEDINGS ARTICLE | June 5, 2001
Proc. SPIE. 4275, Metrology-based Control for Micro-Manufacturing
KEYWORDS: Semiconductors, Internet, Metrology, Sensors, Ions, Manufacturing, Inspection, Control systems, Semiconductor manufacturing, Semiconducting wafers

PROCEEDINGS ARTICLE | April 27, 1999
Proc. SPIE. 3743, In-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturing
KEYWORDS: Semiconductors, Image processing, Manufacturing, Inspection, Data processing, Microelectronics, Semiconductor manufacturing, Information theory, Semiconducting wafers, Wafer testing

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top