Charlotte Bouet
at CEA-Grenoble
SPIE Involvement:
Publications (3)

Proceedings Article | 3 April 2020 Paper
G. Rademaker, A. Le Pennec, T. Giammaria, K. Benotmane, H. Pham, C. Bouet, M. G. Gusmao Cacho, M. Argoud, M.-L. Pourteau, A. Paquet, A. Gharbi, C. Navarro, C. Nicolet, X. Chevalier, K. Sakavuyi, P. Nealey, R. Tiron
Proceedings Volume 11326, 113260Z (2020)
KEYWORDS: Lithography, Metrology, Directed self assembly, Immersion lithography, Photomasks, Optical lithography, Etching, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 25 March 2020 Paper
Aurélie Le Pennec, Jérôme Rêche, Patrick Quéméré, Guido Rademaker, Romain Jarnias, Charlotte Bouet, Célia Nicolet, Christophe Navarro, Maxime Argoud, Raluca Tiron
Proceedings Volume 11326, 113261I (2020)
KEYWORDS: Line width roughness, Ultraviolet radiation, Edge detection, Polymethylmethacrylate, Directed self assembly, Binary data, Polymerization, Statistical analysis, Software development

Proceedings Article | 23 March 2020 Paper
Nathalie Frolet, Maxime Argoud, Charlotte Bouet, Karine Jullian, Yuji Tanaka, Chisayo Mori, You Arisawa, Tomohiro Motono, Masahiko Harumoto, Harold Stokes, Masaya Asai, Raluca Tiron
Proceedings Volume 11326, 113261J (2020)
KEYWORDS: Oxygen, Annealing, Directed self assembly, Control systems, Materials processing, Oxidation

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