Dr. Charlotte A. Cutler
Research Scientist at DuPont Electronics & Imaging
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 24 March 2020
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Lithography, Diffractive optical elements, Image processing, Diffusion, Image resolution, Image analysis, Line width roughness, Nanoimprint lithography, Photoresist processing, Temperature metrology

Proceedings Article | 23 March 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Scanning electron microscopy, Line width roughness

Proceedings Article | 13 March 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Lithography, Etching, Dry etching, Polymers, Reflectivity, Ion implantation

Proceedings Article | 25 March 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Lithography, Optical lithography, Cadmium, Materials processing, Scanning electron microscopy, Printing, Photoresist materials, Line width roughness, Double patterning technology, Critical dimension metrology, Semiconducting wafers, Photoresist developing, 193nm lithography

Showing 5 of 9 publications
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