Dr. Chelladurai Devadoss
Senior Process Engineer at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | June 26, 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Carbon, Thin films, Sensors, Polymers, Molecules, X-rays, Silicon, Chemistry, Chlorine, Liquids

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