Chen-Ming Wu
at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | December 12, 2009
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Wafer-level optics, Lithography, Data modeling, Calibration, Scanners, Optimization (mathematics), Semiconducting wafers, Yield improvement, Model-based design, Process modeling

PROCEEDINGS ARTICLE | August 20, 2004
Proc. SPIE. 5446, Photomask and Next-Generation Lithography Mask Technology XI
KEYWORDS: Lithography, Reticles, Metals, Manufacturing, Inspection, Scanning electron microscopy, Wafer inspection, Critical dimension metrology, Semiconducting wafers, Resolution enhancement technologies

PROCEEDINGS ARTICLE | June 26, 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Radar, Lithography, Optical lithography, Scanners, Manufacturing, Control systems, Finite element methods, Critical dimension metrology, Semiconducting wafers, Optics manufacturing

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