Chen-Ming Wu
at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Publications (3)

Proceedings Article | 12 December 2009 Paper
Tsung-Chih Chien, C. Y. Shih, R. C. Peng, H. H. Liu, Y. C. Chen, H. J. Lee, John Lin, K. W. Chang, C. M. Wu, W. H. Hung, Tommy Lee, H. C. Wu, X. Xie, W. J. Shao, C. H. Chang, R. Aldana, Y. Cao, R. Goossens, Simon Hsieh
Proceedings Volume 7520, 75201Q (2009)
KEYWORDS: Scanners, Semiconducting wafers, Calibration, Lithography, Yield improvement, Model-based design, Data modeling, Wafer-level optics, Optimization (mathematics), Process modeling

Proceedings Article | 20 August 2004 Paper
Zih-Wen Chang, Chen-Ming Wu, Mabel Mo, Chin-Chung Shieh, D.S. Cheng, Chun-Chien Chen, Richard Yang, David Randall, Wen-Cheng Yu
Proceedings Volume 5446, (2004)
KEYWORDS: Reticles, Semiconducting wafers, Manufacturing, Inspection, Critical dimension metrology, Metals, Resolution enhancement technologies, Wafer inspection, Scanning electron microscopy, Lithography

Proceedings Article | 26 June 2003 Paper
S. Chiua, Yao-Chang Chu, J. Hsieh, Wang Pen Mo, C. Wu, Thomas Teng, Mike Slessor
Proceedings Volume 5040, (2003)
KEYWORDS: Lithography, Semiconducting wafers, Finite element methods, Critical dimension metrology, Scanners, Optical lithography, Optics manufacturing, Control systems, Manufacturing, Radar

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