Dr. Chen Chao
at The Hong Kong Polytechnic Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 3 May 2007
Proc. SPIE. 6556, Micro (MEMS) and Nanotechnologies for Defense and Security
KEYWORDS: Resonators, Ultrasonography, Etching, Electrodes, Silicon, Ultrasonics, Transducers, Micromachining, Signal generators, Anisotropic etching

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