Dr. Chen Li
at Zhejiang Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | November 24, 2016
Proc. SPIE. 10023, Optical Metrology and Inspection for Industrial Applications IV
KEYWORDS: Electron beam lithography, Diffraction, Finite-difference time-domain method, Imaging systems, Scattering, Calibration, Light scattering, Inspection, Electromagnetism, Electromagnetic scattering

PROCEEDINGS ARTICLE | November 24, 2016
Proc. SPIE. 10023, Optical Metrology and Inspection for Industrial Applications IV
KEYWORDS: Optical components, Microscopes, Imaging systems, Scattering, Image processing, Inspection, Distortion, Optical inspection, Standards development, Defect inspection

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