Dr. Chen Li
at ICRD
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | 29 November 2022
Xuelong Shi, Yan Yan, Chen Li, Mingyang Xia, Bingyang Pan, Ying Gao, Wei Yuan
JM3, Vol. 21, Issue 04, 043203, (November 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.4.043203
KEYWORDS: Optical proximity correction, Machine learning, Data modeling, Statistical modeling, Photomasks, Education and training, SRAF, Performance modeling, Deep convolutional neural networks, Visual process modeling