A new wavefront reconstruction algorithm for radial shearing interferometer is proposed. Based on the shearing relationship between the expanded wavefront and the test wavefront, the interpolation coefficient matrix are established by the radial shearing ratio and the number of discrete points of test wavefront. Accordingly, the expanded wavefront can be described by an interpolation coefficient matrix and the test wavefront. Then the test wavefront can be calculated from the phase difference wavefront which comes from any radial shearing interferometer. The numerical simulation proves the correctness of the algorithm. The main error source of this algorithm has been analyzed and the error propagation coefficient has been calculated at last. Above results show that the proposed algorithm is an effective and correct algorithm to reconstruct wavefront for radial shearing interferometer.
Zonal wavefront reconstruction by use of the well known Southwell algorithm with rectangular grid patterns has been considered in the literature. However, when the grid patterns are nonrectangular, modal wavefront reconstruction has been extensively used. We propose an improved zonal wavefront reconstruction algorithm for Hartmann type test with arbitrary grid patterns. We develop the mathematical expressions to show that the wavefront over arbitrary grid patterns, such as misaligned, partly obscured, and non-square mesh grids, can be estimated well. Both iterative solution and least-square solution for the proposed algorithm are described and compared. Numerical calculation shows that the zonal wavefront reconstruction over nonrectangular profile with the proposed algorithm results in a significant improvement in comparison with the Southwell algorithm.
Self-referencing interferometry has been widely used in wavefront sensing. However, currently the results of wavefront measurement include two parts, one is the real phase information of wavefront under test and the other is the system error in self-referencing interferometer. In this paper, a method based on maximum likelihood estimation is presented to calibrate the system error in self-referencing interferometer. Firstly, at least three phase difference distributions are obtained by three position measurements of the tested component: one basic position, one rotation and one lateral translation. Then, combining the three phase difference data and using the maximum likelihood method to create a maximum likelihood function, reconstructing the wavefront under test and the system errors by least square estimation and Zernike polynomials. The simulation results show that the proposed method can deal with the issue of calibration of a self-referencing interferometer. The method can be used to reduce the effect of system errors on extracting and reconstructing the wavefront under test, and improve the measurement accuracy of the self-referencing interferometer.