Cheng-Chang Lee
at National Chiao Tung Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Microelectromechanical systems, Etching, Silicon, Surface roughness, Scanning electron microscopy, Photoresist materials, Photomasks, Wet etching, Reactive ion etching, Radium

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