A novel optoelectrofulidic system integrated optical image concentration and alignment system, dielectrophoresis
phenomenon, microfluidic and friendly real-time control interface is first reported in this article. A new application of
photoconductive material oxotitanium phthalocyanine (TiOPc) for microparticle applying has been first described and
demonstrated by our research group. Basis on the special character of the photoconductive material, a TiOPc-based
optoelectronic tweezers (Ti-OET) is utilized for single and massive cells/particles manipulation. The objects wanted to
be manipulated are defined with different behaviors (e.g., press, release, drag and move) using Flash® software when the
cursor acts on them. It also reveals the application for biological application to form the cells trapping with three sorts of
cells, HMEC-1, HepG2 and HEK293t.
Another application of our optoelectrofulidic system is to fabricate a TiOPc-based flow cytometry chip which can be
used for sorting the 15μm diameter particles with 105 μm/s velocity. When the 10Vp.p. voltage and 45 kHz AC
frequency apply on the top and button ITO electrode, the illuminated light pattern will become a spatially virtual switch
inside the microchannel. The dielectrophoresis force between top ITO glass and button photoconductive layer controlled
by the friendly interface will concentrate the cells/particles as a straight line and individually direct each one in different
In summary, we have established an optoelectronfulidic-based chip and spatially virtual switch system which are applied
for cell pattern and particles sorting. In the future, this easy manipulation approach can place the full power of
optoelectronfulidic chip into the biological operators' hands.
A novel electrolysis-bubble-actuated micropump has been successfully developed by utilizing a specific roughness
gradient design on the hydrophobic lateral breather which could achieve a net pumping flow. The micropump is
implemented by means of electrolysis, surface tension effect and the periodic electrolysis-bubble generation. The
advantages of this proposed micropump design not only achieve a net pumping flow but also resolve the disadvantages
that exist in the early proposed electrochemical micropumps, such as the complicated time-sequence power control on
many pairs of electrodes, the need of large/long nozzle-diffuser structure and the limitation of the sealed reservoir inside
the fluidic chip. This micropump with a simple circuit control and without moving parts is suitable for the development
of low power-consumption and compact micropumps. Experimental results successfully demonstrate the pumping
function of our micropump to continuously push liquid forward via the gradient roughness design and the periodic
generation of electrolytic bubbles in a microchannel. Furthermore, experimental results also show that the liquid
displacement and pumping rate could be easily and accurately controlled by adjusting the applied voltage with specific
operating frequency. A maximum pumping rate of 114 nl/min is achieved for our micropump #1 with a microchannel
cross section of 100 µm × 20 µm. In this paper, we describe the theoretical analysis, design, micromachining process, and
operating principles, as well as the experimental demonstration of this micropump.
A novel microelectromechanical grating with both pitch and blaze angle tuning functions has been designed, simulated, and fabricated and is reported in this paper. This grating device could change spectrum angle through adjusting grating pitch and make reflection match with a particular diffraction order by the blaze angle tuning. This grating could have better dispersion efficiency than most previous tunable gratings because of its small grating pitch. Besides, the reflective surfaces of our MEMS grating are constructed by surface-micromachining aluminum to get high reflective efficiency. For wide tuning range, this grating uses bulk actuators to provide large displacement of about 70um for tuning more than 1/10 of original pitch length. All tuning functions are operated by electrostatic force with a driving voltage below 120V.
We report a 1xN rotary optical switching mirror actuated by an electrostatic comb-driver for the optical networking. A variety of MEMS optical switching mirrors have been recently proposed. Some of these devices utilize surface micromachined films as reflection micromirrors and result in optical degradation. Some of these devices fabricated by bulk micromachining highly rely on delicate assembly for the micromirrors to the top of the actuators. In this paper, we focus on developing a rotary optical switching micromirror with no need of delicate assembly. The rotary actuator and the switching micromirror are both fabricated by deep RIE in our design. We use the Spin-On-Glass (SOG), which is used as the intermediated layer in the low temperature boning, to fabricate a rotary MEMS optical switching mirror with self-assembly. We successfully assemble the micromirror on top of the rotor stage of the rotary actuator. Experimental results show that our rotary vertical micromirror rotates about 1.5° under 150 volts. The first vibration mode of this rotary switching MEMS mirror is a rotary mode and appears around 3.4 kHz, which is measured via a Polytec laser doppler vibrometer.
Conference Committee Involvement (4)
Optomechatronic Systems Control II
2 October 2006 | Boston, Massachusetts, United States
Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
12 December 2005 | Brisbane, Australia
Optomechatronic Systems Control
5 December 2005 | Sapporo, Japan
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II