Dr. Cheng-Hsien Wu
at Dayeh Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | February 23, 2005
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Nickel, Manufacturing, Scanning electron microscopy, Printing, Photoresist materials, Diffusers, Photomasks, Analytical research, Semiconducting wafers, Electroplating

PROCEEDINGS ARTICLE | February 23, 2005
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Diffraction, Optical design, Beam splitters, Optical lithography, Nickel, Printing, Photomasks, Semiconducting wafers, Electroplating, Diffraction gratings

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