Proceedings Article | 23 February 2005
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Nickel, Manufacturing, Scanning electron microscopy, Printing, Photoresist materials, Diffusers, Photomasks, Analytical research, Semiconducting wafers, Electroplating
A problem with micromechanics is that the commonly used fabrication methods and materials are relatively expensive. To be competitive on the market, new low-cost materials and manufacturing methods are necessary. Different micro-devices have already been made, e.g., micropumps. Micro-replication also enables different materials like polymers, metals and ceramics to be used. The research was conducted through part design, mold fabrication, experimental analysis, and quality test. The process parameters including injection speed, melt temperature, mold temperature and packing pressure on quality of micropumps were investigated. The injection molded part was actuated by a piezoelectric disc. Flow test was conducted to check the micropump performance.
