Dr. Cheng-Hung Chen
Principal Engineer at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 9 September 2013
Proc. SPIE. 8880, Photomask Technology 2013
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Data modeling, Backscatter, Scattering, Laser scattering, Monte Carlo methods, Photomasks, Critical dimension metrology

Proceedings Article | 26 March 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Silica, Backscatter, Scattering, Diffusion, Laser scattering, Electroluminescence, Monte Carlo methods, Quantization, Raster graphics, Modulation transfer functions

Proceedings Article | 3 January 2005
Proc. SPIE. 5643, Advances in Optical Data Storage Technology
KEYWORDS: Mathematical modeling, Actuators, Spindles, Detection and tracking algorithms, Computer simulations, Head, Optical tracking, Servomechanisms, Optical discs, Motion estimation

Proceedings Article | 3 January 2005
Proc. SPIE. 5643, Advances in Optical Data Storage Technology
KEYWORDS: Actuators, Optical design, Digital signal processing, Field programmable gate arrays, Control systems, Signal processing, Servomechanisms, Analog electronics, Algorithm development, Optical discs

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