CONFERENCE PROCEEDINGS
Advanced Search >
Dr. Cheng-Yang Liu
Researcher at Industrial Technology Research Institute
SPIE Involvement:
Author
Publications (3)
PROCEEDINGS ARTICLE | June 17, 2009
Polarized optical scattering measurements of metallic nanoparticles upon a silicon wafer
Proc. SPIE. 7389, Optical Measurement Systems for Industrial Inspection VI
KEYWORDS: Gold, Polarization, Scattering, Nanoparticles, Particles, Silicon, Light scattering, Picosecond phenomena, Semiconducting wafers, Scatter measurement
PROCEEDINGS ARTICLE | June 17, 2009
Fabrication and optical characteristics of silicon-based two-dimensional photonic crystal wavelength division multiplexing splitter
Proc. SPIE. 7389, Optical Measurement Systems for Industrial Inspection VI
KEYWORDS: Fabrication, Electron beam lithography, Finite-difference time-domain method, Waveguides, Dielectrics, Silicon, Photonic crystals, Wavelength division multiplexing, Multiplexing, Wave propagation
PROCEEDINGS ARTICLE | August 11, 2008
Optical heterodyne laser encoder for in-plane nanopositioning
Proc. SPIE. 7063, Interferometry XIV: Techniques and Analysis
KEYWORDS: Beam splitters, Sensors, Interferometry, Computer programming, Heterodyning, Scanning probe microscopy, Laser optics, Signal detection, Optics manufacturing, Diffraction gratings
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Back to Top