Dr. Cheng-Yang Liu
Researcher at Industrial Technology Research Institute
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | June 17, 2009
Proc. SPIE. 7389, Optical Measurement Systems for Industrial Inspection VI
KEYWORDS: Gold, Polarization, Scattering, Nanoparticles, Particles, Silicon, Light scattering, Picosecond phenomena, Semiconducting wafers, Scatter measurement

PROCEEDINGS ARTICLE | June 17, 2009
Proc. SPIE. 7389, Optical Measurement Systems for Industrial Inspection VI
KEYWORDS: Fabrication, Electron beam lithography, Finite-difference time-domain method, Waveguides, Dielectrics, Silicon, Photonic crystals, Wavelength division multiplexing, Multiplexing, Wave propagation

PROCEEDINGS ARTICLE | August 11, 2008
Proc. SPIE. 7063, Interferometry XIV: Techniques and Analysis
KEYWORDS: Beam splitters, Sensors, Interferometry, Computer programming, Heterodyning, Scanning probe microscopy, Laser optics, Signal detection, Optics manufacturing, Diffraction gratings

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