Dr. Cheng-ming Lin
Technical Manager at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Publications (4)

Proceedings Article | 28 August 2003 Paper
Cheng-ming Lin, Rick Lai, W. Huang, B. Wang, C. Chen, C. Kung, Chue-San Yoo, Jieh-Jang Chen, Sheng-Cha Lee
Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504189
KEYWORDS: Inspection, Particles, Scanning electron microscopy, Chromium, Atomic force microscopy, Dry etching, Photomasks, Contamination, Photoresist processing, Optical proximity correction

Proceedings Article | 1 August 2002 Paper
Cheng-Ming Lin, Wen-An Loong
Proceedings Volume 4754, (2002) https://doi.org/10.1117/12.476985
KEYWORDS: Aluminum, Silicon, Optical properties, Argon, Aluminum nitride, Transmittance, Sputter deposition, Phase shifts, Photomasks, Lithography

Proceedings Article | 1 August 2002 Paper
Proceedings Volume 4754, (2002) https://doi.org/10.1117/12.476986
KEYWORDS: Transmittance, Photomasks, Image resolution, Phase shifts, Resolution enhancement technologies, Image transmission, Lithography, Image enhancement, Lithographic illumination, Scattering

Proceedings Article | 26 July 1999 Paper
Cheng-ming Lin, Keh-wen Chang, Ming-der Lee, Wen-An Loong
Proceedings Volume 3679, (1999) https://doi.org/10.1117/12.354320
KEYWORDS: Etching, Sputter deposition, Phase shifts, Optical properties, Chemical analysis, Plasma, Silica, Photomasks, Low pressure chemical vapor deposition, Palladium

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