Dr. Cheng Luo
at Louisiana Tech Univ
SPIE Involvement:
Conference Program Committee | Author
Publications (12)

PROCEEDINGS ARTICLE | May 3, 2007
Proc. SPIE. 6556, Micro (MEMS) and Nanotechnologies for Defense and Security
KEYWORDS: Oxides, Lithography, Etching, Interfaces, Silicon, Oxygen, Deep reactive ion etching, Semiconducting wafers, Oxidation, Nanowires

PROCEEDINGS ARTICLE | May 3, 2007
Proc. SPIE. 6556, Micro (MEMS) and Nanotechnologies for Defense and Security
KEYWORDS: Semiconductors, Lithography, Polymethylmethacrylate, Capacitors, Polymers, Metals, Silicon, Diodes, Aluminum, Heterojunctions

PROCEEDINGS ARTICLE | May 3, 2007
Proc. SPIE. 6556, Micro (MEMS) and Nanotechnologies for Defense and Security
KEYWORDS: Target detection, Lithography, Polymethylmethacrylate, Sensors, Polymers, Molecules, Resistance, Microsensors, Polymer thin films, Polymeric sensors

PROCEEDINGS ARTICLE | May 3, 2007
Proc. SPIE. 6556, Micro (MEMS) and Nanotechnologies for Defense and Security
KEYWORDS: Lithography, Optical lithography, Polymethylmethacrylate, Polymers, Metals, Dielectrics, Silicon, Oxygen, Aluminum, Nanoimprint lithography

PROCEEDINGS ARTICLE | May 3, 2007
Proc. SPIE. 6556, Micro (MEMS) and Nanotechnologies for Defense and Security
KEYWORDS: Lithium, Molecular bridges, Silica, Sensors, Etching, Nickel, Silicon, Bridges, Plasma etching, Semiconducting wafers

PROCEEDINGS ARTICLE | May 18, 2006
Proc. SPIE. 6223, Micro (MEMS) and Nanotechnologies for Space Applications
KEYWORDS: Target detection, Lithography, Nose, Glucose, Polymethylmethacrylate, Sensors, Polymers, Silicon, Resistance, Humidity

Showing 5 of 12 publications
Conference Committee Involvement (4)
Micro (MEMS) and Nanotechnologies for Space, Defense, and Security II
18 March 2008 | Orlando, Florida, United States
Nanosensors and Microsensors for Bio-Systems
11 March 2008 | San Diego, California, United States
Nano-, Micro- and Bio-Sensors and Systems
21 March 2007 | San Diego, California, United States
Smart Electronics, MEMS, BioMEMS, and Nanotechnology
27 February 2006 | San Diego, California, United States
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