Dr. Cheng Wang
at Lawrence Berkeley National Lab
SPIE Involvement:
Publications (11)

Proceedings Article | 10 April 2024 Presentation
Proceedings Volume 12955, 129550A (2024) https://doi.org/10.1117/12.3010967
KEYWORDS: Scattering, X-rays, X-ray imaging, X-ray characterization, Photoresist materials, X-ray sources, Data modeling, Light scattering, Laser scattering, Extreme ultraviolet lithography

Proceedings Article | 22 November 2023 Poster
Proceedings Volume PC12750, PC1275012 (2023) https://doi.org/10.1117/12.2689943
KEYWORDS: Scattering, X-rays, X-ray imaging, Metrology, Systems modeling, X-ray sources, X-ray characterization, Time metrology, Spatial resolution, Simulations

Proceedings Article | 30 April 2023 Presentation
Ricardo Ruiz, Stacey Bent, Samuel Blau, Brett Helms, Frances Houle, Oleg Kostko, Patrick Naulleau, Paul Nealey, Christopher Ober, Dahyun Oh, Rachel Segalman, Cheng Wang
Proceedings Volume PC12497, PC124970J (2023) https://doi.org/10.1117/12.2662699
KEYWORDS: Optical lithography, Stochastic processes, Photoresist materials, Molecular self-assembly, Materials processing, Extreme ultraviolet lithography, Extreme ultraviolet, X-ray characterization, Semiconductors, Semiconductor manufacturing

Proceedings Article | 11 November 2022 Presentation
Proceedings Volume PC12292, PC1229204 (2022) https://doi.org/10.1117/12.2642893
KEYWORDS: X-rays, Metrology, Image processing, Optical lithography, X-ray lithography, Spatial resolution, Scattering, Photoresist processing, Nanostructuring, Lithography

Proceedings Article | 24 March 2020 Presentation
Isvar Cordova, Luke Long, Guillaume Freychet, Cheng Wang, P. Naulleau
Proceedings Volume 11323, 113231P (2020) https://doi.org/10.1117/12.2552178

Showing 5 of 11 publications
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