Dr. Chengke Xie
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | August 5, 2015
Proc. SPIE. 9621, 2015 International Conference on Optical Instruments and Technology: Advanced Lasers and Applications
KEYWORDS: Lithography, Lithographic illumination, Deep ultraviolet, Sensors, Laser applications, CCD cameras, Excimer lasers, Critical dimension metrology, Pulsed laser operation, Fiber optic illuminators

PROCEEDINGS ARTICLE | January 28, 2009
Proc. SPIE. 7156, 2008 International Conference on Optical Instruments and Technology: Optical Systems and Optoelectronic Instruments
KEYWORDS: Particles, Interfaces, Biosensors, Control systems, Phosphorescence, Signal processing, Particle filters, Image filtering, Signal detection, Control systems design

PROCEEDINGS ARTICLE | January 28, 2009
Proc. SPIE. 7156, 2008 International Conference on Optical Instruments and Technology: Optical Systems and Optoelectronic Instruments
KEYWORDS: Gold, Scattering, Particles, Light scattering, Reflectivity, Scanning electron microscopy, Transmittance, Mie scattering, Photometry, Absorption

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