Micro-sensors are highly desired for on-line temperature/pressure monitoring in turbine engines to improve
their efficiency and reduce pollution. The biggest challenge for developing this type of sensors is that the sensors have to
sustain at extreme environments in turbine engine environments, such as high-temperatures (>800 °C), fluctuated
pressure and oxidation/corrosion surroundings. In this paper, we describe a class of sensors made of polymer-derived
ceramics (PDCs) for such applications. PDCs have the following advantages over conventional ceramics, making them
particularly suitable for these applications: (i) micromachining capability, (ii) tunable electric properties, and (iii) hightemperature
capability. Here, we will discuss the materials and their properties in terms of their applications for hightemperature
micro-sensors, and microfabrication technologies. In addition, we will also discuss the design of a heat-flux
sensor based on polymer-derived ceramics.
Conference Committee Involvement (3)
Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems
10 March 2013 | San Diego, California, United States
Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems
12 March 2012 | San Diego, California, United States
Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems
7 March 2011 | San Diego, California, United States
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