Dr. Chenxi Lin
SPIE Involvement:
Publications (6)

Proceedings Article | 20 March 2020 Presentation + Paper
Proceedings Volume 11325, 113251O (2020) https://doi.org/10.1117/12.2552823
KEYWORDS: Semiconducting wafers, Overlay metrology, Process control, Feedback control, Optical parametric oscillators, Control systems, High volume manufacturing, Data processing, Metrology, Optical lithography

Proceedings Article | 13 March 2018 Paper
Hakki Ergun Cekli, Jelle Nije, Alexander Ypma, Vahid Bastani, Dag Sonntag, Henk Niesing, Linmiao Zhang, Zakir Ullah, Venky Subramony, Ravin Somasundaram, William Susanto, Masazumi Matsunobu, Jeff Johnson, Cyrus Tabery, Chenxi Lin, Yi Zou
Proceedings Volume 10585, 105851N (2018) https://doi.org/10.1117/12.2297304
KEYWORDS: Pattern recognition, Fingerprint recognition, Semiconducting wafers, Scanners, Metrology, Overlay metrology, Optical lithography, Lithography, Manufacturing, Optical parametric oscillators, Process control, Principal component analysis

Proceedings Article | 16 October 2017 Presentation + Paper
Shibing Wang, Jing Su, Quan Zhang, Weichun Fong, Dezheng Sun, Stanislas Baron, Cuiping Zhang, Chenxi Lin, Been-Der Chen, Rafael Howell, Stephen Hsu, Larry Luo, Yi Zou, Yen-Wen Lu, Yu Cao
Proceedings Volume 10451, 104510D (2017) https://doi.org/10.1117/12.2283493
KEYWORDS: SRAF, Machine learning, Lithography, Photomasks, Optical proximity correction, Model-based design, Computational lithography, Data modeling, Image processing

SPIE Journal Paper | 24 August 2017
JM3, Vol. 16, Issue 03, 033504, (August 2017) https://doi.org/10.1117/12.10.1117/1.JMM.16.3.033504
KEYWORDS: Lithography, Neural networks, Convolution, Neurons, Machine learning, Photomasks, Performance modeling, Feature extraction, Convolutional neural networks, Sensors

Proceedings Article | 28 March 2017 Presentation + Paper
Proceedings Volume 10148, 1014807 (2017) https://doi.org/10.1117/12.2258374
KEYWORDS: Neurons, Photomasks, Convolutional neural networks, Sensors, Very large scale integration, Lithography, Convolution, Neural networks, Machine learning, Feature extraction, Data modeling, Design for manufacturing

Showing 5 of 6 publications
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