Cheol Shin
at S&S TECH
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | September 26, 2016
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Thin films, Lithography, Optical lithography, Modulation, Etching, Manufacturing, Reflectivity, Chromium, Transmittance, Photomasks

PROCEEDINGS ARTICLE | October 8, 2014
Proc. SPIE. 9235, Photomask Technology 2014
KEYWORDS: Etching, Sputter deposition, Manufacturing, Chromium, Transmittance, Photomasks, Scanning probe microscopy, Molybdenum, Semiconducting wafers, Phase shifts

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