Cheol-Kyun Kim
Principal Engineer
SPIE Involvement:
Publications (26)

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11327, 113270C (2020)
KEYWORDS: SRAF, Pulmonary function tests, Printing, Machine learning, Optical proximity correction, Photomasks, Artificial neural networks, Data modeling, Logic devices, Lithography

Proceedings Article | 26 March 2019 Presentation + Paper
Young-Seok Kim, SeIl Lee, Zhenyu Hou, Yiqiong Zhao, Meng Liu, Yunan Zheng, Qian Zhao, Daekwon Kang, Lei Wang, Mark Simmons, Mu Feng, Jun Lang, Byoung-Il Choi, Gilbert Kim, Hakyong Sim, Jongcheon Park, Gyun Yoo, JeonKyu Lee, Sung-woo Ko, Jaeseung Choi, Cheolkyun Kim, Chanha Park
Proceedings Volume 10959, 1095913 (2019)
KEYWORDS: Calibration, Metrology, Optical proximity correction, Data modeling, Instrument modeling, Scanning electron microscopy, Time metrology, Neural networks, Semiconducting wafers

Proceedings Article | 16 March 2016 Paper
Proceedings Volume 9781, 978114 (2016)
KEYWORDS: Metals, Design for manufacturing, Manufacturing, Critical dimension metrology, Shape analysis, Etching, Databases, Visualization, Design for manufacturability, Logic devices

Proceedings Article | 15 March 2016 Paper
Taejun You, Taehyeong Lee, Gyun Yoo, Youngjoon Park, Cheolkyun Kim, Donggyu Yim
Proceedings Volume 9780, 97801E (2016)
KEYWORDS: Semiconducting wafers, Photomasks, Critical dimension metrology, Reflection, Optical proximity correction, Optical lithography, Dry etching, Buildings, Lithography, Image processing, Data modeling, Visualization, Scanning electron microscopy, Antireflective coatings

Proceedings Article | 31 March 2014 Paper
Proceedings Volume 9052, 905220 (2014)
KEYWORDS: Data modeling, Semiconducting wafers, 3D modeling, Etching, Chemical mechanical planarization, Scanning electron microscopy, Process modeling, Virtual reality, Wafer inspection, Calibration

Showing 5 of 26 publications
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