Cheol-Kyun Kim
Principal Engineer
SPIE Involvement:
Author
Publications (26)

Proceedings Article | 23 March 2020
Proc. SPIE. 11327, Optical Microlithography XXXIII
KEYWORDS: Lithography, Data modeling, Artificial neural networks, Printing, Photomasks, Machine learning, Logic devices, Optical proximity correction, SRAF, Pulmonary function tests

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Metrology, Data modeling, Calibration, Scanning electron microscopy, Time metrology, Neural networks, Optical proximity correction, Semiconducting wafers, Instrument modeling

Proceedings Article | 16 March 2016
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Visualization, Databases, Etching, Metals, Manufacturing, Design for manufacturing, Shape analysis, Logic devices, Critical dimension metrology, Design for manufacturability

Proceedings Article | 15 March 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Lithography, Antireflective coatings, Optical lithography, Data modeling, Visualization, Reflection, Dry etching, Image processing, Scanning electron microscopy, Buildings, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 31 March 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Data modeling, Calibration, Etching, 3D modeling, Scanning electron microscopy, Wafer inspection, Virtual reality, Semiconducting wafers, Process modeling, Chemical mechanical planarization

Showing 5 of 26 publications
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