Cheong Wei Chong
at Univ Kebangsaan Malaysia
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Thin films, Titanium, Sensors, Annealing, Crystals, Silicon, Scanning electron microscopy, Bismuth, Piezoelectric effects, Perovskite

PROCEEDINGS ARTICLE | April 2, 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Thin films, Multilayers, Electron beams, Sensors, Electrodes, Crystals, Silicon, Heat treatments, Bismuth, Deposition processes

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