Dr. Chester Chien
Manager, Metrology Development at Western Digital Corp
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | May 21, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Principal component analysis, Data modeling, Manufacturing, Magnetism, Process control, Neural networks, Semiconducting wafers, Data integration, Instrument modeling

PROCEEDINGS ARTICLE | April 23, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Manufacturing, Inspection, Scanning electron microscopy, Image quality, Image filtering, Neural networks, Machine learning, Image classification, Critical dimension metrology

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Manufacturing, Scanning electron microscopy, Transmission electron microscopy, Image processing software, 3D metrology, Process control, Semiconductor manufacturing, Critical dimension metrology, Semiconducting wafers

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