Dr. Chi-Chun Liu
Research Staff Member at IBM Research
SPIE Involvement:
Conference Program Committee | Author
Publications (36)

Proceedings Article | 4 May 2020 Presentation + Paper
Proceedings Volume 11325, 113251I (2020) https://doi.org/10.1117/12.2551498
KEYWORDS: Scatterometry, Machine learning, Semiconducting wafers, Critical dimension metrology, Etching, Photoresist materials, Lithography, Metrology, Scatter measurement, Data modeling

Proceedings Article | 6 April 2020 Presentation + Paper
Proceedings Volume 11323, 113230V (2020) https://doi.org/10.1117/12.2551727
KEYWORDS: Line edge roughness, Lithography, Etching, Amorphous silicon, Extreme ultraviolet, Oxidation, Extreme ultraviolet lithography, Optical lithography, Scanning electron microscopy, Critical dimension metrology

Proceedings Article | 24 March 2020 Presentation
Proceedings Volume 11326, 113260W (2020) https://doi.org/10.1117/12.2552112

Proceedings Article | 26 March 2019 Presentation + Paper
Jing Guo, Dustin Janes, Yann Mignot, Richard Johnson, Cheng Chi, Chi-Chun Liu, Luciana Meli, Takuya Kuroda, Domenico DiPaola, Yuji Tanaka, Harumoto Masahiko, Nelson Felix, Daniel Corliss
Proceedings Volume 10958, 109580N (2019) https://doi.org/10.1117/12.2515153
KEYWORDS: Polymethylmethacrylate, Optical lithography, Extreme ultraviolet lithography, Critical dimension metrology, Etching, Chemistry, Ultraviolet radiation, Defect inspection, Extreme ultraviolet, Polymers

Proceedings Article | 26 March 2019 Presentation + Paper
Chi-Chun Liu, Richard Farrell, Kafai Lai, Yann Mignot, Eric Liu, Jing Guo, Yasuyuki Ido, Makoto Muramatsu, Nelson Felix, David Hetzer, Akiteru Ko, John Arnold, Daniel Corliss
Proceedings Volume 10958, 109580L (2019) https://doi.org/10.1117/12.2515862
KEYWORDS: Metals, Critical dimension metrology, Etching, Directed self assembly, Optical lithography, Back end of line, Lithography, Overlay metrology

Showing 5 of 36 publications
Conference Committee Involvement (9)
Novel Patterning Technologies 2024
26 February 2024 | San Jose, California, United States
Novel Patterning Technologies 2023
27 February 2023 | San Jose, California, United States
Novel Patterning Technologies 2022
25 April 2022 | San Jose, California, United States
Novel Patterning Technologies 2021
22 February 2021 | Online Only, California, United States
Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
24 February 2020 | San Jose, California, United States
Showing 5 of 9 Conference Committees
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