Dr. Chi Feng Tseng
at Macronix International Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 18 March 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Near infrared, Opacity, Sensors, Etching, Scanners, Dielectrics, Silicon, Printing, Semiconducting wafers, Chemical mechanical planarization

Proceedings Article | 7 March 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Oxides, Lithography, Optical lithography, Etching, Manufacturing, Photomasks, Double patterning technology, Critical dimension metrology, Tolerancing, Overlay metrology

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