Mr. Chi-Fu Yen Profile

Chi-Fu Yen

at TSMC

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Publications (1)

Proceedings Article | 26 March 2019 Paper

Novel method to achieve CD modeling in the presence of higher diffraction orders

Phillip Atkins, Liequan Lee, Shankar Krishnan, Chi-Fu Yen, Shyh-Shii Pai, Nick Weihan Chang, Hsien-Hung Chang, Li-Shiuan Tsai, Sheng-Yang Tseng, Jan-Hau Chang, Yung-Hsiang Lin, Chu-Han Chiu, Chun-Sheng Wu

Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII

KEYWORDS: Diffraction, Contamination, Data modeling, Ultraviolet radiation, Logic devices, Critical dimension metrology, Algorithm development, Yield improvement, Systems modeling, Light

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