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Dr. Chi-Hsiang Fan
at National Taiwan Univ
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Publications (1)
Proceedings Article | 14 December 2009 Paper
Preliminary design of a two-dimensional electron beam position monitor system for multiple-electron-beam-direct-write lithography
Sheng-Yung Chen, Kuen-Yu Tsai, Hoi-Tou Ng, Chi-Hsiang Fan, Ting-Hang Pei, Chieh-Hsiung Kuan, Yung-Yaw Chen, Jia-Yush Yen
Proceedings Volume 7520, 75202K (2009) https://doi.org/10.1117/12.837048
KEYWORDS: Sensors, Monte Carlo methods, Electron beams, Signal detection, Lithography, Electron beam lithography, Detector arrays, Optical simulations, Semiconducting wafers, Silicon
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