Prof. Chi Hsiang Pan
Associate Professor at National Chin-Yi Institute of Technology
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | July 1, 2005
JM3 Vol. 4 Issue 03
KEYWORDS: Microactuators, Actuators, Silicon, Convection, Fabrication, Doping, 3D modeling, Low pressure chemical vapor deposition, Micromachining

PROCEEDINGS ARTICLE | August 16, 2004
Proc. SPIE. 5455, MEMS, MOEMS, and Micromachining
KEYWORDS: Fabrication, Microelectromechanical systems, Thin films, Calibration, Remote sensing, Silicon, Silicon films, Low pressure chemical vapor deposition, Plasma enhanced chemical vapor deposition, Micromachining

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