Chi Yung Ng
at Nanyang Technological Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 30, 2004
Proc. SPIE. 5274, Microelectronics: Design, Technology, and Packaging
KEYWORDS: Oxides, Holographic optical elements, Capacitors, Chemical species, Interfaces, Silicon, Nitrogen, Free space, Modeling and simulation, Electronics engineering

PROCEEDINGS ARTICLE | March 29, 2004
Proc. SPIE. 5275, BioMEMS and Nanotechnology
KEYWORDS: Oxides, Thin films, Silica, Ultraviolet radiation, Annealing, Silicon, Capacitance, Nanocrystals, Semiconducting wafers, Circuit switching

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