Chia-Cheng Chang
at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 19 March 2008
Proc. SPIE. 6925, Design for Manufacturability through Design-Process Integration II
KEYWORDS: Lithography, Design for manufacturing, Nanoimprint lithography, Optical lithography, Manufacturing, Design for manufacturability, Critical dimension metrology, Model-based design, Semiconducting wafers, Inspection

Proceedings Article | 6 February 2008
Proc. SPIE. 6858, Optics in Tissue Engineering and Regenerative Medicine II
KEYWORDS: Collagen, Second-harmonic generation, Cartilage, Multiphoton microscopy, Stem cells, Tissue engineering, Harmonic generation, Tissues, In vitro testing, Microscopy

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