Lieu Chia Chuen
Section Manager at Micron Semiconductor Asia
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 19 March 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Semiconductors, Coastal modeling, Data modeling, Zernike polynomials, Process control, Semiconducting wafers, Performance modeling, Overlay metrology, Model-based design, Process modeling

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top