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Dr. Chia-Chun Lu
at Synopsys Taiwan Co., Ltd.
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 26 March 2020 Presentation + Paper
Implementing Machine Learning OPC on product layouts
Hesham Abdelghany, Kevin Hooker, Marco Guajardo, Chia-Chun Lu
Proceedings Volume 11328, 1132805 (2020) https://doi.org/10.1117/12.2552398
KEYWORDS: Data modeling, Optical proximity correction, Machine learning, Neural networks, Double patterning technology, Lithography, Deep ultraviolet, Semiconductors, Photomasks, Image segmentation
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