Chia Hung Cho
at Industrial Technology Research Institute
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | August 28, 2015
Proc. SPIE. 9609, Infrared Sensors, Devices, and Applications V
KEYWORDS: Infrared sensors, Optical filters, Sensors, Metals, Photodiodes, Additive manufacturing, High speed cameras, Black bodies, Sensing systems, Temperature metrology

PROCEEDINGS ARTICLE | August 20, 2015
Proc. SPIE. 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII
KEYWORDS: Diffraction, Mirrors, Light sources, Metrology, Databases, CCD cameras, 3D metrology, Extreme ultraviolet, Diffraction gratings, Algorithms

PROCEEDINGS ARTICLE | May 13, 2013
Proc. SPIE. 8788, Optical Measurement Systems for Industrial Inspection VIII
KEYWORDS: Microscopes, Prisms, Microscopy, Error analysis, Silicon, Infrared radiation, Digital image correlation, Semiconducting wafers, Wafer bonding, Overlay metrology

PROCEEDINGS ARTICLE | May 13, 2013
Proc. SPIE. 8788, Optical Measurement Systems for Industrial Inspection VIII
KEYWORDS: Infrared cameras, Infrared imaging, Metrology, Calibration, Interference filters, Interferometry, Semiconducting wafers, Adhesives, Wafer bonding, Phase shifts

SPIE Journal Paper | March 2, 2012
OE Vol. 51 Issue 02
KEYWORDS: High dynamic range imaging, CCD cameras, Reflectivity, Digital Light Processing, Cameras, Calibration, Inspection, Spatial resolution, Phase shifts, Modulation

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