Chiaki Sato
at Canon Inc
SPIE Involvement:
Author
Area of Expertise:
Lithography , Stepper/Scanner
Publications (3)

Proceedings Article | 19 March 2018 Paper
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Lithography, Optical lithography, Capillaries, Ultraviolet radiation, Particles, Photomasks, Nanoimprint lithography, Manufacturing equipment, Semiconducting wafers, Mask cleaning

Proceedings Article | 4 October 2016 Paper
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Semiconductors, Lithography, Curtains, Particles, Manufacturing, Image resolution, Photomasks, Semiconductor manufacturing, Nanoimprint lithography, Semiconducting wafers

Proceedings Article | 22 March 2016 Paper
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Semiconductors, Lithography, Optical lithography, Curtains, Dry etching, Ultraviolet radiation, Particles, Ceramics, Control systems, Photomasks, Semiconductor manufacturing, Nanoimprint lithography, Semiconducting wafers, Overlay metrology, Liquids

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