Dr. Chian Liu Profile

Dr. Chian Liu

Physicist at Argonne National Lab

SPIE Involvement:

Author

Publications (22)

Proceedings Article | 15 October 2012 Paper

Development of grating-based hard x-ray Talbot interferometry for optics and beam wavefront characterization at the advanced photon source

Shashidhara Marathe, Michael Wojcik, Naresh Kujala, Albert Macrander, Han Wen, Chian Liu, Kamel Fezzaa, Ralu Divan, Derrick Mancini, Lahsen Assoufid

Proceedings Volume 8501, 85010J (2012) https://doi.org/10.1117/12.974896

KEYWORDS: X-rays, Wavefronts, X-ray optics, Interferometry, Mirrors, Interferometers, Hard x-rays, Charge-coupled devices, X-ray imaging, Image transmission

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Proceedings Article | 28 September 2011 Paper

Nested KB mirror fabrication for synchrotron hard x-ray nanofocusing

Bing Shi, Wenjun Liu, Jun Qian, Chian Liu, Ruben Khachatryan, Michael Wieczorek, Ali Khounsary, Albert Macrander, Paul Zschack, Jonathan Tischler, Gene Ice, Lahsen Assoufid

Proceedings Volume 8139, 813903 (2011) https://doi.org/10.1117/12.894101

KEYWORDS: Mirrors, Coating, Polishing, Surface finishing, Hard x-rays, X-rays, Synchrotrons, Platinum, Surface roughness, X-ray optics

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Proceedings Article | 4 May 2011 Paper

Multilayer-coated micro-grating array for x-ray phase-contrast imaging

Susanna Lynch, Chian Liu, Lahsen Assoufid, Nicole Morgan, Dumitru Mazilu, Eric Bennett, Camille Kemble, Han Wen

Proceedings Volume 8076, 80760F (2011) https://doi.org/10.1117/12.888939

KEYWORDS: Diffraction gratings, Multilayers, X-rays, Silicon, Semiconducting wafers, Diffraction, X-ray imaging, Interferometers, Refraction, Sensors

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Proceedings Article | 27 August 2010 Paper

Surface profile measurement of KB mirrors using Fizeau laser interferometer

J. Qian, L. Assoufid, C. Liu, B. Shi, W. Liu

Proceedings Volume 7801, 78010K (2010) https://doi.org/10.1117/12.860760

KEYWORDS: Mirrors, Coating, X-rays, Interferometers, Fizeau interferometers, Fabrication, Metrology, Synchrotron radiation, Interferometry, Optical testing

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Proceedings Article | 27 August 2010 Paper

Platinum Kirkpatrik-Baez mirrors for a hard x-ray microfocusing system made by profile coating

Bing Shi, Chian Liu, Jun Qian, Wenjun Liu, Lahsen Assoufid, Ali Khounsary, Raymond Conley, Albert Macrander

Proceedings Volume 7802, 78020G (2010) https://doi.org/10.1117/12.861044

KEYWORDS: Mirrors, Coating, Platinum, X-ray optics, Silicon, Metrology, Spherical lenses, X-rays, Hard x-rays, Sputter deposition

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Proceedings Article | 1 October 2007 Paper

A microstitching interferometer for evaluating the surface profile of precisely figured x-ray K-B mirrors

Lahsen Assoufid, Jun Qian, Cameron Kewish, Chian Liu, Ray Conley, Albert Macrander, Delvin Lindley, Christopher Saxer

Proceedings Volume 6704, 670406 (2007) https://doi.org/10.1117/12.736384

KEYWORDS: Mirrors, Interferometers, Objectives, Microscopes, X-rays, Hard x-rays, Interferometry, X-ray optics, Metrology, Coating

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Proceedings Article | 20 September 2007 Paper

Multilayer growth in the APS rotary deposition system

Ray Conley, Chian Liu, Cameron Kewish, Albert Macrander, Christian Morawe

Proceedings Volume 6705, 670505 (2007) https://doi.org/10.1117/12.736024

KEYWORDS: Reflectivity, Sputter deposition, Multilayers, Silicon, X-rays, X-ray optics, Aluminum, Reflection, Process control, Thin films

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Proceedings Article | 29 August 2006 Paper

Film stress studies and the multilayer Laue lens project

Chian Liu, R. Conley, A. Macrander

Proceedings Volume 6317, 63170J (2006) https://doi.org/10.1117/12.687074

KEYWORDS: Silicon, Multilayers, Chemical species, Molybdenum, Thin films, Semiconducting wafers, Interfaces, Polishing, Chromium, X-rays

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Proceedings Article | 4 November 2004 Paper

Multilayer Laue lenses as high-resolution x-ray optics

Joerg Maser, Gregory Stephenson, Stefan Vogt, Wenbing Yun, Albert Macrander, Hyon Kang, Chian Liu, Ray Conley

Proceedings Volume 5539, (2004) https://doi.org/10.1117/12.560046

KEYWORDS: Zone plates, Diffraction, X-ray optics, Point spread functions, X-rays, Optics manufacturing, Diffraction gratings, Modulation transfer functions, Lenses, Spatial resolution

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Proceedings Article | 3 November 2004 Paper

Synchrotron x-ray study of multilayers in Laue geometry

Hyon Chol Kang, Gregory Stephenson, Chian Liu, Ray Conley, Albert Macrander, Jorg Maser, Sasa Bajt, Henry Chapman

Proceedings Volume 5537, (2004) https://doi.org/10.1117/12.560173

KEYWORDS: Multilayers, Zone plates, Diffraction, X-rays, Hard x-rays, X-ray optics, Multiple scattering, Synchrotrons, Scattering, X-ray diffraction

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Proceedings Article | 3 November 2004 Paper

Small-d-spacing WSi2/Si narrow bandpass multilayers

Chian Liu, Ray Conley, Albert Macrander, Timothy Graber, Christian Morawe, Christine Borel, Eric Dufresne

Proceedings Volume 5537, (2004) https://doi.org/10.1117/12.561399

KEYWORDS: Silicon, X-rays, Reflectivity, Multilayers, Monochromators, Absorption, Interfaces, X-ray diffraction, Sputter deposition, Synchrotron radiation

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Proceedings Article | 29 December 2003 Paper

At the limit of nondispersive micro- and nanofocusing mirror optics

Gene Ice, Eliot Specht, Jonathan Tischler, Ali Khounsary, Lahsen Assoufid, Chian Liu

Proceedings Volume 5347, (2003) https://doi.org/10.1117/12.533345

KEYWORDS: Mirrors, X-rays, Diffraction, Surface finishing, Hard x-rays, Polishing, Coating, X-ray optics, Particles, X-ray diffraction

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SPIE Journal Paper | 1 December 2003

Profile coating and its application for Kirkpatrick-Baez mirrors

Chian Liu, Lahsen Assoufid, Ray Conley, Albert Macrander, Gene Ice, Jonathan Tischler

OE, Vol. 42, Issue 12, (December 2003) https://doi.org/10.1117/12.10.1117/1.1625381

KEYWORDS: Mirrors, Coating, Gold, X-rays, Silicon, Polishing, Surface finishing, Metrology, Optical engineering, Spherical lenses

Proceedings Article | 24 December 2002 Paper

Diffuse scattering sheets in reciprocal space corresponding to Kiessig fringes for x-ray multilayers

Albert Macrander, Yong Chu, Chian Liu, Derrick Mancini

Proceedings Volume 4782, (2002) https://doi.org/10.1117/12.451360

KEYWORDS: Scattering, X-rays, Sputter deposition, Interfaces, Data modeling, Diffraction, Synchrotrons, Differential equations, Correlation function, Scatter measurement

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Proceedings Article | 24 December 2002 Paper

Profile coating of KB mirror applications at the Advanced Photon Source

Chian Liu, L. Assoufid, Albert Macrander, Gene Ice, J. Tischler

Proceedings Volume 4782, (2002) https://doi.org/10.1117/12.456298

KEYWORDS: Mirrors, Coating, Gold, X-rays, Silicon, Photomasks, Polishing, Metrology, X-ray optics, Semiconducting wafers

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For microfocusing x-ray mirrors, an ellipse shape is desirable for aberration-free optics. However, it is difficult to polish elliptical mirrors to x-ray quality smoothness. A differential coating method to convert a cylindrical mirror to an elliptical one has been previously reported The differential coating was obtained by varying the sputter source power while the mirror was passed through. Here we report a new method of profile coating to achieve the same goal more effectively. In the profile coating, the sputter source power is kept constant, while the substrate is passed over a contoured mask at a constant speed. The mask is placed very close to the substrate level (within 1.0 mm) on a shield-can over the sputter gun. Four-inch-diameter Si wafers were coated through a 100-mm-long by 152-mm-wide aperture on the top of the shield-can. The thickness distribution was then obtained using a spectroscopic ellipsometer with computer-controlled X-Y translation stages. A model has been developed to fit the measured thickness distribution of stationary growth. The relative thickness weightings are then digitized at every point 1 mm apart for the entire open area of the aperture. When the substrate is moving across the shield-can during a deposition, the film thickness is directly proportional to the length of the opening on the can along the moving direction. By equating the summation of relative weighting to the required relative thickness at the same position, the length of the opening at that position can be determined. By repeating the same process for the whole length of the required profile, a contour can be obtained for a desired thickness profile. The contoured mask is then placed on the opening of the shield-can. The number of passes and the moving speed of the substrate are determined according to the required thickness and the growth-rate calibration. The mirror coating profile is determined from the ideal surface figure of a focus ellipse and that obtained from a long trace profiler on the substrate. Preliminary test results using Au as a coating material are presented.

Proceedings Article | 21 November 2002 Paper

Focused two-dimensional antiscatter grid for mammography

Olga Makarova, Nicolai Moldovan, Cha-Mei Tang, Derrick Mancini, Ralu Divan, Vladislav Zyryanov, David Ryding, Judith Yaeger, Chian Liu

Proceedings Volume 4783, (2002) https://doi.org/10.1117/12.451018

KEYWORDS: X-rays, Copper, Photomasks, Polymethylmethacrylate, Mammography, Plating, Gold, X-ray sources, Metals, Scanning electron microscopy

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Proceedings Article | 5 January 2001 Paper

Sagittally focusing multilayers for wiggler beamlines

Karl Smolenski, Randall Headrick, Chian Liu, Albert Macrander

Proceedings Volume 4145, (2001) https://doi.org/10.1117/12.411649

KEYWORDS: Multilayers, Reflectivity, Monochromators, Crystals, Silicon, X-rays, Laser crystals, X-ray optics, Synchrotrons, Polishing

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Proceedings Article | 16 November 1999 Paper

Fabrication of Wolter I multilayer coated optics via electroforming: an update

Melville Ulmer, Robert Altkorn, Anita Madan, Michael Graham, Yip-Wah Chung, Allen Krieger, Chian Liu, Barry Lai, Derrick Mancini, Peter Takacs

Proceedings Volume 3773, (1999) https://doi.org/10.1117/12.370081

KEYWORDS: Multilayers, Mirrors, X-rays, Nickel, Reflectivity, Copper, Liquids, Nitrogen, Sputter deposition, Thin film coatings

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Proceedings Article | 16 November 1999 Paper

Laterally graded multilayer double-monochromator

Albert Macrander, Jens Als-Nielsen, Chian Liu, S. Krasnicki, Jozef Maj, Derrick Mancini, Jenny Erdmann, P. Gaarde

Proceedings Volume 3773, (1999) https://doi.org/10.1117/12.370084

KEYWORDS: Monochromators, Chlorine, Reflectivity, Silicon, Grazing incidence, Diffraction, Glasses, X-rays, Interfaces, Reflection

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Proceedings Article | 11 December 1998 Paper

Water-cooled crystal and multilayer optics for a wiggler beamline

Karl Smolenski, Randall Headrick, Qun Shen, Brian Carroll, Ali Khounsary, Chian Liu, Albert Macrander

Proceedings Volume 3448, (1998) https://doi.org/10.1117/12.332523

KEYWORDS: Multilayers, Crystals, Silicon, Monochromators, Surface finishing, Polishing, Reflectivity, Distortion, Crystal optics, X-rays

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Proceedings Article | 11 December 1998 Paper

Use of Kirkpatrick-Baez multilayer optics for x-ray fluorescence imaging

Alex Bakulin, Stephen Durbin, Chian Liu, Jenny Erdmann, Albert Macrander, Terrence Jach

Proceedings Volume 3448, (1998) https://doi.org/10.1117/12.332509

KEYWORDS: X-rays, X-ray imaging, X-ray fluorescence spectroscopy, Mirrors, Luminescence, X-ray optics, CCD cameras, Multilayers, Synchrotrons, Crystals

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Proceedings Article | 11 December 1998 Paper

Specular and diffuse x-ray scattering from tungsten/carbon multilayers having a high reflectivity at 10 keV

Albert Macrander, Randall Headrick, Chian Liu, Jenny Erdmann, Ali Khounsary, Karl Smolenski, S. Krasnicki, Jozef Maj

Proceedings Volume 3448, (1998) https://doi.org/10.1117/12.332517

KEYWORDS: Scattering, Multilayers, Interfaces, Reflectivity, Diffraction, X-rays, Scatter measurement, Laser scattering, Correlation function, Crystal optics

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Showing 5 of 22 publications

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