Chiau Yen Lau
at GLOBALFOUNDRIES Singapore
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 6, 2004
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Electron beams, Reticles, Deep ultraviolet, Scattering, Laser applications, Laser scattering, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

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