Dr. Chidam G. Kallingal
Manager, TD Global Engineering Support at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 20 March 2018 Presentation + Paper
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Image processing, Photomasks, Machine learning, Source mask optimization, Computational lithography, Optical proximity correction, SRAF, Model-based design

Proceedings Article | 24 March 2017 Presentation + Paper
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Lithography, Logic, Genetic algorithms, Matrices, Image processing, Silicon, Manufacturing, Printing, Photomasks, Optical proximity correction, SRAF, Algorithm development, Optimization (mathematics), Semiconducting wafers

Proceedings Article | 18 March 2015 Paper
Proc. SPIE. 9427, Design-Process-Technology Co-optimization for Manufacturability IX
KEYWORDS: Lithography, Photovoltaics, Optical lithography, Manufacturing, Photomasks, Optical proximity correction, SRAF, Neodymium, Semiconducting wafers, Resolution enhancement technologies

Proceedings Article | 12 April 2013 Paper
Proc. SPIE. 8683, Optical Microlithography XXVI
KEYWORDS: Diffraction, Data modeling, Calibration, Metals, Error analysis, 3D modeling, Photomasks, Optical proximity correction, Critical dimension metrology, Performance modeling

Proceedings Article | 16 March 2009 Paper
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Lithography, Diffraction, Reticles, Optical lithography, Polarization, Fourier transforms, Critical dimension metrology, Line edge roughness, Semiconducting wafers, Fiber optic illuminators

Showing 5 of 10 publications
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