Dr. Chie Matsubara
at Osaka Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 29 March 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, Polymers, Water, Molecules, Crystals, Diffusion, Solids, Immersion lithography, Polymer thin films, Liquids

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