Dr. Chieh-Han Wu
at Taiwan Semiconductor Manufacturing Company
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 13 March 2018 Paper
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Oxides, Optical lithography, Polymethylmethacrylate, Etching, Polymers, Scanning electron microscopy, Bridges, Directed self assembly, Double patterning technology, Picosecond phenomena

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