Dr. Chieh-Tang Chuang
at National Tsing Hua Univ
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | July 1, 2009
JM3 Vol. 8 Issue 03
KEYWORDS: Sensors, Electrodes, Oxides, Reactive ion etching, Microelectromechanical systems, Silicon, Numerical simulations, Finite element methods, Photomasks, Etching

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Sensors, Electrodes, Silicon, Capacitance, Finite element methods, Photomasks, Deep reactive ion etching, Micromachining, High aspect ratio silicon micromachining

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