Dr. Chieh-Tang Chuang
at National Tsing Hua Univ
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 1 July 2009
JM3 Vol. 8 Issue 03
KEYWORDS: Sensors, Electrodes, Oxides, Reactive ion etching, Microelectromechanical systems, Silicon, Numerical simulations, Finite element methods, Photomasks, Etching

Proceedings Article | 1 July 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Sensors, Electrodes, Deep reactive ion etching, Photomasks, Capacitance, Micromachining, Silicon, High aspect ratio silicon micromachining, Finite element methods, Microelectromechanical systems

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