Prof. Chien-Chung Tsai
Associate Professor at Ming Hsin Univ of Science and Technology
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 22 January 2007
Proc. SPIE. 6466, MOEMS and Miniaturized Systems VI
KEYWORDS: Microelectromechanical systems, Actuators, Optical components, Mirrors, Metals, Signal processing, Microopto electromechanical systems, Micromirrors, Semiconductor manufacturing, Motion analysis

Proceedings Article | 22 January 2007
Proc. SPIE. 6466, MOEMS and Miniaturized Systems VI
KEYWORDS: Microelectromechanical systems, Semiconductors, Actuators, Mirrors, Metals, Signal processing, Microopto electromechanical systems, Micromirrors, Reactive ion etching, Process modeling

Proceedings Article | 23 January 2006
Proc. SPIE. 6113, MEMS/MOEMS Components and Their Applications III
KEYWORDS: Microelectromechanical systems, Actuators, Optical components, Mirrors, Metals, Signal processing, Microopto electromechanical systems, Micromirrors, Structural design, Motion analysis

Proceedings Article | 23 January 2006
Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV
KEYWORDS: Microelectromechanical systems, Actuators, Diffraction, Optical design, Metals, Optoelectronics, Geometrical optics, Helium neon lasers, Surface micromachining, Diffraction gratings

Proceedings Article | 22 January 2005
Proc. SPIE. 5717, MEMS/MOEMS Components and Their Applications II
KEYWORDS: Microelectromechanical systems, Actuators, Mirrors, Metals, 3D modeling, Scanning electron microscopy, Signal processing, Microopto electromechanical systems, Micromirrors, Photomasks

Showing 5 of 7 publications
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