Chien-Lin Lee
Doctoral Candidate at National Taiwan Univ
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 1 October 2019
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Lithography, Metrology, Optical lithography, Extreme ultraviolet lithography, Helium, Ion beam lithography

Proceedings Article | 20 March 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Transistors, Extreme ultraviolet lithography, TCAD, Device simulation

Proceedings Article | 20 March 2019
Proc. SPIE. 10961, Optical Microlithography XXXII
KEYWORDS: Lithography, Photomasks, Machine learning, Computational lithography, Optical proximity correction

Proceedings Article | 19 March 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Point spread functions, Modulation, Scattering, Helium, Ion beam lithography, Model-based design, Process modeling

Proceedings Article | 28 March 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Lithography, Electron beam lithography, Metrology, Optical lithography, Inspection, Ion beams, Bridges, Helium, Critical dimension metrology, Photoresist processing

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