Chih-Hao Huang
Inventor at Macronix International Co Ltd
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 27 March 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Antireflective coatings, Optical lithography, Metals, Capillaries, Copper, Interfaces, Coating, Photoresist materials, Process control, Semiconducting wafers, Photoresist developing, Back end of line

Proceedings Article | 18 March 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Near infrared, Opacity, Sensors, Etching, Scanners, Dielectrics, Silicon, Printing, Semiconducting wafers, Chemical mechanical planarization

Proceedings Article | 29 March 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Optical lithography, Contamination, Polymers, Diffusion, Manufacturing, Printing, Compact discs, Critical dimension metrology, Photoresist processing, Semiconducting wafers

Proceedings Article | 3 April 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Lithography, Etching, Image segmentation, Image processing, Coating, Scanning electron microscopy, Scatterometry, Photomasks, Semiconducting wafers, Overlay metrology

Proceedings Article | 21 April 2011
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Optical lithography, Etching, Image processing, Coating, Reflectivity, Printing, Photomasks, Critical dimension metrology, Photoresist processing, Semiconducting wafers

Showing 5 of 8 publications
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