Mr. Chih Hsun Lin Profile

Chih Hsun Lin

at United Microelectronics Corp

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Publications (2)

Proceedings Article | 18 April 2013 Paper

In-line high-K/metal gate monitoring using picosecond ultrasonics

C. Hsu, R. Huang, J. Chen, J. Tan, H. Huang, Welch Lin, Y. Hsieh, W. Tsao, C. Chen, Y. Lin, C. Lin, H. Hsu, K. Liu, C. Huang, J. Wu, J. Dai, P. Mukundhan

Proceedings Volume 8681, 86811C (2013) https://doi.org/10.1117/12.2011348

KEYWORDS: Semiconducting wafers, Picosecond phenomena, Metals, Ultrasonics, Chemical mechanical planarization, Transmission electron microscopy, Acoustics, Aluminum, Nondestructive evaluation, Calibration

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Proceedings Article | 5 April 2012 Paper

Fast and accurate scatterometry metrology method for STI CMP step height process evaluation

Chih-Hsun Lin, Climbing Huang, Chia-Lin Hsu, Wu-Sian Sie, J. Y. Wu, Ching-Hung Lin, Zhi-Qing Xu, Qiong-Yan Yuan, Sungchul Yoo, Chien-Jen Huang, Chao-Yu Cheng, Juli Cheng, Zhiming Jiang, Houssam Chouaib

Proceedings Volume 8324, 832421 (2012) https://doi.org/10.1117/12.916235

KEYWORDS: Semiconducting wafers, Metrology, Scatterometry, Single crystal X-ray diffraction, Chemical mechanical planarization, Diffractive optical elements, Process control, Scatter measurement, Inspection, Transmission electron microscopy

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